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Optical/laser microlithography II : 1-3 March 1989, San Jose, California
- Available as
- Online
Details
- Creator
- Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
- Format
- Books
- Language
- English
- Publication
-
- Bellingham, Wash., USA : SPIE--The International Society for Optical Engineering, [1989]
- ©1989
- Physical Details
-
- viii, 572 pages : illustrations ; 28 cm
- ISBNs
- 9780819401236, 0819401234
- OCLC
- ocm20271782
- Includes bibliographies and index.