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Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia
- Available as
- Physical
Details
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- Creator
- Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1984]
- ©1984
- Physical Details
-
- vi, 172 pages : illustrations ; 28 cm
- ISBNs
- 0892525150, 9780892525157
- OCLC
- ocm11492197
- Includes bibliographies and index.