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Silicides for VLSI applications

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Silicides for VLSI applications

Author / Creator: Murarka, S. P
Available as: Online; Physical

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Creator: S.P. Murarka
Format: Books
Language: English
Publication: New York : Academic Press, 1983
Physical Details: xi, 200 pages : illustrations ; 24 cm
ISBNs: 0125112203, 9780125112208
OCLC: ocn561492874, ocm08786066

Includes index.

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Electronics -- Materials.
Integrated circuits -- Very large scale integration.
Silicides.

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Silicides for VLSI applications

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