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The design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control
- Author / Creator
- Available as
- Physical
Details
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- Creator
- Loren W. Linholm ; sponsored by U.S. Air Force ... [and others]
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O., 1981
- Physical Details
-
- v, 142 pages : illustrations ; 26 cm
- OCLC
- ocm08343460
- "Electron Devices Division, Center for Electronics and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards."
- Microfiche. [Washington, D.C.] : U.S. Dept. of Commerce, National Bureau of Standards : available from the Supt. of Docs., U.S. Govt. Print. Off., 1981. 2 sheets ; 11 x 15 cm.
- Includes bibliographical references.