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Special issue on semiconductor materials, processing, and process modeling for IC technology
- Conferences
- International Electron Devices Meeting (1977 : Washington, D.C.)
- Available as
- Online
- Physical
Details
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- Creator
- [R. W. Dutton, guest editor.]
- Included Titles
-
- IEEE Xplore
- IEEE Xplore journals
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- New York : Institute of Electrical and Electronic Engineers, c1978
- Physical Details
-
- p. 417-532 : ill. ; 28 cm
- Includes bibliographies.
- Also available in electronic format on the World Wide Web.