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Probe Size and Detection Efficiency Optimization in Electrostatic Lens Systems Using Multi-Objective Genetic Algorithms
- Author / Creator
- Conferences
- EIPBN 2021 Sessions 1A Q&A - Ion Beam (2021)
- Available as
- Online
- Summary
-
Electrostatic lens system optimization is a challenge, especially for systems having many free variables with more than one objective function. An example is minimization of probe size for a primar...
Electrostatic lens system optimization is a challenge, especially for systems having many free variables with more than one objective function. An example is minimization of probe size for a primary beam, with in-lens secondary electron detection with maximum detection efficiency. This subject has been investigated here using Multi-Objective GA.
Details
- Creator
- Cornelis W Hagen, Pieter Kruit, Neda Hesam Mahmoudi Nezhad, Ali Mohammadi Gheidari, Mohamad Ghaffarian Niasar
- Format
- Videos, Slides, Films
- Language
- English
- Contributors
- Publication
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- New York, N.Y. : Underline, 2021
- Physical Details
-
- 1 online resource
- digital
- video file MPEG-4 Flash
- Event name: EIPBN 2021.
- Event session: Sessions 1A Q&A - Ion Beam.
- "Paper Number: 7".
- Originally produced by Cornelis W Hagen, Pieter Kruit, Neda Hesam Mahmoudi Nezhad, Ali Mohammadi Gheidari, Mohamad Ghaffarian Niasar in 2021.
- Event name: EIPBN 2021 ; Event session: Sessions 1A Q&A - Ion Beam, held on (June 02, 2021 15:36).
- System requirements: Adobe Flash Player.
- In English.