Search

Articles
Catalog
Databases
Journals
UWDC

Ask a Librarian
Accounts & Lists
Libraries
UW–Madison
Give
Help
Website Search

schedule

Available today at 9 a.m.

Additional Options

Call / Text
Consultation Appointment
Visit
Email

Business Library
College Library (Undergraduate)
Ebling Library (Health Sciences)
Gender and Women's Studies Librarian
Information School Library (Information Studies)
Law Library (Law)
Memorial Library (Humanities & Social Sciences)
MERIT Library (Education)
Steenbock Library (Agricultural & Life Sciences, Engineering)

Ask a Librarian Hours & Policy
Library Research Tutorials

Search the for

Articles Find articles in journals, magazines, newspapers, and more

Catalog Explore books, music, movies, and more

Databases Locate databases by title and description

Journals Find journal titles

UWDC Discover digital collections, images, sound recordings, and more

Website Find information on spaces, staff, services, and more

Website Search

Find information on spaces, staff, and services.

ASK a Librarian
Library by Appointment
Locations & Hours
Resources by Subject

Catalog Search

Search the physical and online collections at UW-Madison, UW System libraries, and the Wisconsin Historical Society.

keyboard_arrow_down

Available Online
Print/Physical Items
Limit to UW-Madison

Advanced Search
Browse by...
WorldCat

Database Search

Find databases subscribed to by UW-Madison Libraries, searchable by title and description.

Browse by Subject/Type
Introductory Databases
Top 10 Databases

Journal Search

Find journal titles available online and in print.

keyboard_arrow_down

Available Online
Print/Physical Items
Limit to UW-Madison

Browse by Subject / Title
BrowZine
Citation Search

Article Search

Find articles in journals, magazines, newspapers, and more.

keyboard_arrow_down

Available Online
Scholarly (peer-reviewed)
Open Access

Citation Search
Library Databases

UW Digital Collections Search

Discover digital objects and collections curated by the UW Digital Collections Center.

keyboard_arrow_down

Browse Collections
Browse UWDC Items

University of Wisconsin–Madison
Libraries

- UW Home
- My UW
- Email/Calendar
- Canvas
- Box
- Google Apps
Help
Give

Search the UW-Madison Libraries

Articles
Catalog
Databases
Journals
UWDC

favorite Saved Lists

book

Catalog Search

keyboard_arrow_down

Search
Catalog
MOEMS and Miniaturized Systems. XX : 6-11 March...

Books

MOEMS and Miniaturized Systems. XX : 6-11 March 2021 Online Only, United States

Available as: Online

View Online

Citation

Details

Creator: Hans Zappe, Wibool Piyawattanametha, Yong-Hwa Park, editors
Format: Books
Language: English
Contributors: Zappe, Hans, editor

Park, Yong-Hwa, editor

Piyawattanametha, Wibool, editor
Publication: Bellingham, Washington : SPIE, 2021
Series: Proceedings of SPIE--the International Society for Optical Engineering ; Volume 11697
Physical Details: 1 online resource (264 pages)
ISBNs: 9781510642300, 1510642307, 1510642293

Subjects

Microelectromechanical systems -- Congresses.
Miniature electronic equipment -- Congresses.

Content Types

Congresses

Items Related By Call Number

Shelf Browse

View nearby items

Additional Information

Staff view

Libraries

Accessibility
Copyright Statement
Policies

Feedback, questions, or accessibility issues: libraries@wisc.edu

Support Libraries volunteer_activism

Keyboard Shortcuts

Available anywhere

?: Shortcut help message
s: Highlight search box
esc: Close dialog

Available in search results

n: Next page
p: Previous page
f: Toggle filters
1-5: Open nth result on page

Additional Options

Chat with a Specific library

Catalog Search

MOEMS and Miniaturized Systems. XX : 6-11 March 2021 Online Only, United States

Details

Publication Details

Subjects

Content Types

Items Related By Call Number

Additional Information

Information from the Web

Library Staff Details

Keyboard Shortcuts

Available anywhere

Available in search results