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Soft X-ray and EUV imaging systems : 3-4 August...

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Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA

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Format: Books
Language: English
Contributors: Stulen, R. H Contributor

Kaiser, Winfried M Contributor

Society of Photo Optical Instrumentation Engineers

Society of Photo-optical Instrumentation Engineers
Publication: [Place of publication not identified] SPIE 2000
Series: SPIE proceedings series Soft X-ray and EUV imaging systems
ISBNs: 0819437913

Bibliographic Level Mode of Issuance: Monograph
English

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Grenz rays -- Industrial applications -- Congresses
Ultraviolet radiation -- Industrial applications -- Congresses
X-rays -- Congresses
X-ray optics -- Congresses

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Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA

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