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Micromachining technology for micro-optics : 20...

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Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA

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Format: Books
Language: English
Contributors: Lee, S. H Contributor

Johnson, Eric Gunnar Contributor

Semiconductor Equipment and Materials International

Society of Photo-optical Instrumentation Engineers

Sandia National Laboratories

Society of Photo Optical Instrumentation Engineers

Solid State Technology (Organization)
Publication: [Place of publication not identified] SPIE 2000
Series: SPIE proceedings series Micromachining technology for micro-optics
ISBNs: 0819438359

Bibliographic Level Mode of Issuance: Monograph
English

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Integrated optics -- Industrial applications -- Congresses
Optoelectronic devices -- Industrial applications -- Congresses
Miniature electronic equipment -- Congresses
Microelectromechanical systems -- Congresses

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Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA

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