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Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA
- Available as
- Online
Details
- Format
- Books
- Language
- English
- Contributors
-
- Perez-Maher, Mary Ann. Contributor
- Stewart, Harold D Contributor
- Perez-Maher, Mary Ann Contributor
- Semiconductor Equipment and Materials International
- Solid State Technology (Organization)
- Society of Photo Optical Instrumentation Engineers
- Society of Photo-optical Instrumentation Engineers
- Sandia National Laboratories
- Publication
-
- [Place of publication not identified] SPIE 2005
- ISBNs
- 0819456896
- Bibliographic Level Mode of Issuance: Monograph
- English