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28th European Mask and Lithography Conference : 17-18 January 2012, Dresden, Germany
- Author / Creator
- Conferences
- European Mask and Lithography Conference (28th : 2012 : Dresden, Germany)
- Available as
- Online
Details
- Creator
- Uwe F. W. Behringer, Wilhelm Maurer, editors ; organized by VDE/VDI GMM-The Society for Microelectronics, Micro- and Precision Engineering (Germany)
- Other Title
-
- Twenty-eighth European Mask and Lithography Conference : 17-18 January 2012, Dresden, Germany
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Washington : SPIE, 2012
- Physical Details
-
- 1 online resource (366 pages)
- ISBNs
- 081949030X