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Electron-beam, X-ray, and ion-beam technology :...

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Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VII : 2-4 March 1988, Santa Clara, California

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Format: Books
Language: English
Contributors: Yanof, Arnold W Contributor

Society of Photo-optical Instrumentation Engineers

Society of Photo Optical Instrumentation Engineers
Publication: [Place of publication not identified] The Society 1988
Series: Proceedings of SPIE--the International Society for Optical Engineering Electron-beam, X-ray, and ion-beam technology
ISBNs: 089252958X

Bibliographic Level Mode of Issuance: Monograph
English

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Lithography, Electron beam -- Congresses
X-ray lithography -- Congresses
Ion beam lithography -- Congresses

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Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VII : 2-4 March 1988, Santa Clara, California

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