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Optical microlithography and metrology for microcircuit fabrication : proceedings, ECO2, 27-28 April, 1989, Paris, France
- Author / Creator
- Conferences
- European Congress on Optics (2nd : 1989 : Paris, France)
- European Congress on Optics
- Available as
- Online
Details
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- [Place of publication not identified] SPIE 1989
- ISBNs
- 0819401749
- Bibliographic Level Mode of Issuance: Monograph
- English