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| 008 | 160829s2003 xx o eng d | |
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| 050 | _0 | $aTK7875.R439 2003 |
| 082 | $a621.381 | |
| 245 | 00 | $aReliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA |
| 264 | 31 | $a[Place of publication not identified]$bSPIE$c2003 |
| 336 | $atext$btxt | |
| 337 | $acomputer$bc | |
| 338 | $aonline resource$bcr | |
| 490 | 0_ | $aSPIE proceedings series Reliability, testing, and characterization of MEMS/MOEMS II |
| 500 | $aBibliographic Level Mode of Issuance: Monograph | |
| 546 | $aEnglish | |
| 650 | _0 | $aMicroelectromechanical systems$xReliability$vCongresses |
| 650 | _0 | $aMicroelectromechanical systems$xTesting$vCongresses |
| 650 | _7 | $aElectrical & Computer Engineering$2HILCC |
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| 700 | $aTanner, Danelle Mary$eContributor | |
| 700 | $aRamesham, Rajeshuni$eContributor | |
| 710 | $aSociety of Photo-optical Instrumentation Engineers$eContent Provider | |
| 710 | 2_ | $aSandia National Laboratories$eContent Provider |
| 710 | 2_ | $aSociety of Photo Optical Instrumentation Engineers$eContent Provider |
| 710 | 2_ | $aSolid State Technology (Organization)$eContent Provider |
| 710 | 2_ | $aSemiconductor Equipment and Materials International$eContent Provider |
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