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Extracting IC surface microtopography using SEM stereo
- Author / Creator
- Conferences
- Robots 12 and Vision '88 Conference (1988 : Detroit, Mich.)
- Available as
- Physical
Details
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- Creator
- Ali E. Kayaalp, Ramesh Jain
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Dearborn, Mich. : Society of Manufacturing Engineers, 1988
- Physical Details
-
- pages 17-31 : illustrations ; 28 cm
- OCLC
- ocm71475408
- Cover title.
- "Robots 12 and Vision '88, June 6-9, 1988, Detroit, Michigan."
- Includes bibliographical references (page 31).