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Computer simulation of mass-selective plasma-source ion implantation
- Author / Creator
- Available as
- Physical
Details
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- Creator
- by Eric Benjamin Wickesberg, J. L. Shohet, M. J. Kushner
- Format
- Manuscripts, Theses
- Language
- English
- Contributors
- Publication
-
- 1994
- Physical Details
-
- 13 leaves : illustrations ; 28 cm
- OCLC
- ocn962368112
- Typescript.
- A report submitted in partial fulfillment of the requirements of Master's Degree (Electrical and Computer Engineering).
- M.S. University of Wisconsin--Madison 1994.
- Includes bibliographical references.