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2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference : 16-19 May 2016, Saratoga Springs, New York, USA
- Author / Creator
- Conferences
- Annual SEMI Advanced Semiconductor Manufacturing Conference (27th : 2016 : Saratoga Springs, N.Y.)
- Available as
- Online
Details
- Creator
- Institute of Electrial and Electronics Engineers, Semiconductor Equipment and Materials International
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Piscataway, New Jersey : Institute of Electrical and Electronics Engineers, 2016
- Physical Details
-
- 1 online resource (474 pages)
- ISBNs
- 9781509002702, 1509002707, 1509002715