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Smart sensors and mems : intelligent devices and microsystems for industrial applications
- Available as
- Physical
- Summary
-
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device,...
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions.Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, adva
Details
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- Creator
- edited by Stoyan Nihtianov and Antonio Luque
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Cambridge, [England] : Woodhead Publishing, 2014
- ©2014
- Physical Details
-
- 1 online resource (560 p.)
- ISBNs
- 0857099299, 9780857095022, 9780857099297, 0857095021
- OCLC
- ocn859181810
- Description based upon print version of record.
- Includes bibliographical references at the end of each chapters and index.
- English
- Cover; Smart sensors and MEMS: Intelligent devices and microsystems for industrial applications; Copyright; Contents; Contributor contact details; Woodhead Publishing Series in Electronic and Optical Materials; Preface; Part I Smart sensors for industrial applications; 1 What makes sensor devices and microsystems 'intelligent' or 'smart'?; 1.1 Introduction; 1.2 Interpretation of terms related to sensors; 1.3 Key trends in the development of sensors (sensor devices) and MEMS; 1.4 Suggestions for improving terminology in the field; 1.5 Conclusion; 1.6 Acknowledgment; 1.7 References
- 2 Direct interface circuits for sensors2.1 Introduction; 2.2 Sensors; 2.3 Microcontrollers; 2.4 Interface circuits; 2.5 Applications; 2.6 Future trends; 2.7 Sources of further information and advice; 2.8 References; 3 Capacitive sensors for displacement measurement in the sub-nanometer range; 3.1 Introduction; 3.2 Challenges for sub-nanometer displacement measurement with capacitive sensors; 3.3 Offset capacitance cancellation technique; 3.4 Capacitance-to-digital converter (CDC) with offset capacitance cancellation and calibration functions; 3.5 Conclusion; 3.6 References
- 4 Integrated inductive displacement sensors for harsh industrial environments4.1 Introduction; 4.2 Principles of operation and practical limitations for eddy-current sensors (ECSs); 4.3 Design requirements in precision industrial applications; 4.4 State-of-the-art ECS interfaces; 4.5 ECS interfaces with an LC oscillator and ratiometric measurement; 4.6 Conclusion; 4.7 References; 5 Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range; 5.1 Introductory overview
- 5.2 Challenges for radiation detection in the EUV and VUV spectral ranges5.3 Device solutions for radiation detection in the EUV and VUV spectral ranges; 5.4 Methods of radiometric investigation and characterization; 5.5 Spectral responsivity and radiation hardness of EUV and VUV radiation detectors; 5.6 Future trends; 5.7 References; 6 Integrated polarization analyzing CMOS image sensors for detection and signal processing; 6.1 Introduction; 6.2 Polarization vision; 6.3 Polarization cameras; 6.4 Design of a polarization sensor
- 6.5 Polarization vision in machine vision applications: material classification6.6 Conclusion; 6.7 References; 7 Advanced interfaces for resistive sensors; 7.1 Introduction; 7.2 Resistive sensors; 7.3 Voltamperometric resistance estimation; 7.4 Resistance-to-time conversion methods; 7.5 Conclusion and future trends; 7.6 References; 8 Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications; 8.1 Introduction; 8.2 Fundamentals of ultrasonic sensing and pulse-echo measurements; 8.3 Reconfigurable ultrasonic smart sensor platform (RUSSP) design
- 8.4 Algorithms used in evaluation of RUSSP