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Characterization and metrology for ULSI technology
- Author / Creator
- Conferences
- International Conference on Characterization and Metrology for ULSI Technology (2005 : Richardson, Tex.)
- Available as
- Online
- Physical
Details
Checking for availability...
- Creator
- editors, David G. Seiler ... [and others] ; sponsoring organizations, National Institute of Standards and Technology ... [and others]
- Format
- Books
- Language
- English
- Publication
-
- Melville, N.Y. : American Institute of Physics, 2005
- Physical Details
-
- xx, 667 pages : illustrations ; 28 cm + 1 CD-ROM (4 3/4 in.)
- ISBNs
- 0735402779, 9780735402775
- OCLC
- ocm62092510
- Includes bibliographical references and index.