Henry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [and others]
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4559
Holger Becker, Peter Woias, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4982
Siegfried W. Janson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4981
Eric G. Johnson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4984
Hakan Urey, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4985